|
Specification # 428
MODIFIED: 29 May 2002 Adds 27 - 33 µm thickness, 150 mm & 200
mm
DATE: 30 Jul 1999
Specification for: 100 mm, Thin, DSP Silicon Wafer
| ITEMS WHICH ARE
BOLD ARE STANDARD |
| Diameter: |
100.0 ± 0.5
mm, 150 ± 0.2 mm & 200 ± 0.2
mm |
| Type/Orientation: |
NP <100>,
NSb <100>, NAs <100>,
PB <100>
NP <111>, NSb <111>, NAs <111>,
PB <111>
NOTE — neutron doped also available |
| Resistivity
Low: |
0.001 W-cm |
| Resistivity
High: |
70,000 W-cm |
| Thickness µm |
TTV µm |
Stock ** |
Stock **
Ohm-cm |
| 9-11 |
Experimental |
|
|
| 27 - 33 |
1, 2 |
NP <100> |
1 - 10 |
| 40 - 60 |
1, 3 |
NP <100> |
1 - 10 |
| 90 - 100 |
1, 3 |
NP <100>,
PB <100> |
1 - 10 |
| 195-205 |
1, 3 |
NP <100>,
PB <100> |
1 - 10 |
| 245-255 |
1, 3 |
PB <100> |
1 - 10 |
| 295-305 |
1, 2, 5 or
10 |
NP <100> |
1 - 10 |
| 395-405 |
1, 2, 5 or
10 |
NP <100> |
1 - 10 |
| 495-505 |
1, 2, 5 or
10 |
NP <100>,PB <100> |
1 - 10 |
| 995 - 1005 |
1, 2,
5 or 10 |
ASK |
ASK |
| Thickness Tolerance: |
± 5 µm, ± 2 µm
and ± 1 µm available
± 25 µm also available for thicknesses ³ 260 µm |
| Orientation Tolerance: |
± 1°, ± 0.5°, ± 0.25° and ± 0.1° available |
| Primary Flat Orientation: |
<110> ± 1°, ± 0.5°, ± 0.25° and ± 0.1° available |
| Length: |
SEMI std for diameter
specified |
| Second Flat: |
SEMI Standard or
better |
| Length: |
SEMI std for diameter
specified |
| Finish Front: |
Full damage removal
polish |
| Finish Back: |
Full damage removal
polish |
| Bow/WARP: |
40 µm Max,
20 typical, 10 and lower available |
| |
|
| LASER MARK [Possible
Options]: |
None, Naked Eyeball
visible, Per SEMI Std M1.5-89.
Not available on <150 µm thickness. |
| |
|
| ** - If you do not
see it - Ask, as our inventory is expanding. |
PACKING AND SHIPPING- STANDARD
UV release standard membrane – [27
- 33 µm]
Single Wafer Hard Box: All wafers < 250 µm
Hard Cassettes of 25: All wafers £ 250 µm
Package shall bear following minimum information:
This Specification reference
Material identification
Quantity
CERTIFICATION - STANDARD
Each shipment to be accompanied with
the following:
Certificate of Conformance to this specification or customer specification
NOTE: ALL ITEMS WHICH ARE BOLD ARE STANDARD AND APPLY ALSO TO INVENTORY
STOCK.
|
