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Specification # 428
MODIFIED: 29 May 2002 Adds 27 - 33 µm thickness, 150 mm & 200 mm
DATE: 30 Jul 1999
Specification for: 100 mm, Thin, DSP Silicon Wafer

ITEMS WHICH ARE BOLD ARE STANDARD
Diameter: 100.0 ± 0.5 mm, 150 ± 0.2 mm & 200 ± 0.2 mm
Type/Orientation: NP <100>, NSb <100>, NAs <100>, PB <100>
NP <111>, NSb <111>, NAs <111>, PB <111>
NOTE — neutron doped also available
Resistivity Low: 0.001 W-cm
Resistivity High: 70,000 W-cm

Thickness µm TTV µm Stock ** Stock **
Ohm-cm
9-11 Experimental    
27 - 33 1, 2 NP <100> 1 - 10
40 - 60 1, 3 NP <100> 1 - 10
90 - 100 1, 3 NP <100>, PB <100> 1 - 10
195-205 1, 3 NP <100>, PB <100> 1 - 10
245-255 1, 3 PB <100> 1 - 10
295-305 1, 2, 5 or 10 NP <100> 1 - 10
395-405 1, 2, 5 or 10 NP <100> 1 - 10
495-505 1, 2, 5 or 10 NP <100>,PB <100> 1 - 10
995 - 1005 1, 2, 5 or 10 ASK ASK

Thickness Tolerance: ± 5 µm, ± 2 µm and ± 1 µm available
± 25 µm also available for thicknesses ³ 260 µm
Orientation Tolerance: ± 1°, ± 0.5°, ± 0.25° and ± 0.1° available
Primary Flat Orientation: <110> ± 1°, ± 0.5°, ± 0.25° and ± 0.1° available
Length: SEMI std for diameter specified
Second Flat: SEMI Standard or better
Length: SEMI std for diameter specified
Finish Front: Full damage removal polish
Finish Back: Full damage removal polish
Bow/WARP: 40 µm Max, 20 typical, 10 and lower available
   
LASER MARK [Possible Options]: None, Naked Eyeball visible, Per SEMI Std M1.5-89.
Not available on <150 µm thickness.
   
** - If you do not see it - Ask, as our inventory is expanding.

PACKING AND SHIPPING- STANDARD
UV release standard membrane – [27 - 33 µm]
Single Wafer Hard Box:    All wafers < 250 µm
Hard Cassettes of 25:      All wafers £ 250 µm
Package shall bear following minimum information:
   This Specification reference
   Material identification
   Quantity

CERTIFICATION - STANDARD
Each shipment to be accompanied with the following:
Certificate of Conformance to this specification or customer specification


NOTE: ALL ITEMS WHICH ARE BOLD ARE STANDARD AND APPLY ALSO TO INVENTORY STOCK.

 

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